Dow Corning Patents Antireflective Coating

September 11, 2013

U.S. 8,263,312 B2
Dow Corning Corporation has been awarded a patent for a method of forming an antireflective coating (ARC) on an electronic device comprised of applying to an electronic device an ARC composition comprised of a silsesquioxane resin having the formula (PhSiO(3-x)/2(OH)x)mHSiO(3-x)/2(OH)x)n(MeSiO(3-x)/2(OH)x)p where Ph is a phenyl group, Me is a methyl group, x has a value of 0, 1 or 2; m has a value of 0.01 to 0.99, n has a value of 0.01 to 0.99, p has a value of 0.01 to 0.99, and m+n+p≈1; a polyethylene oxide fluid having the general formula R1(CH2CH2O)zR2, wherein R1 is allyl and R2 is selected from H, a hydrocarbon group having 1 to 3 carbon atoms, an unsaturated hydrocarbon group, and an acetyl group (CH3CO—), and z is such that the polyethylene oxide fluid typically has a molecular weight of 50 to 5000 g/mol; and a solvent; and removing the solvent and curing the silsesquioxane resin to form an ARC on the electronic device; forming a resist image over the ARC and etching a pattern in the anti-reflective film.