Entegris has acquired of the semiconductor coatings business of Surmet Corporation, located in Burlington, MA. The acquisition strengthens Entegris' leadership in delivering solutions that purify, protect and transport critical materials in semiconductor applications, and gives Surmet customers access to a wider range of global resources.

Surmet is a pioneer in high-performance, high-purity coatings that protect wafer handling and equipment components, such as electrostatic clamps, in the semiconductor manufacturing process, as well as reduce contamination of wafers from the components themselves. These microparticle-free and corrosion-resistant high-performance coatings use an innovative low-temperature plasma process that can be applied on a wide range of substrates.