Momentive Performance Materials Quartz Inc. (MPM) has increased and expanded its manufacturing capacity of tantalum carbide coatings (TaC) in response to the larger demand for silicon carbide power (SiC) devices and increased need for improved dimensional control for gallium nitride (GaN) LEDs. With the expansion, MPM has the capability to produce up to 750 mm diameter parts, versus the 500 mm previous limitation. The diameter increase can help enable next generation SiC epi tools and can provide improved dimensional control for the current GaN tools now using alternate protective coatings.