MKS Instruments, Inc. has introduced the I-250, I-500 and I-1000 Mass Flow Controllers. These products extend MKS’ I-Series full scale flow rate capabilities to 250, 500 and 1000 slm, respectively, and provide mass flow control for large scale production processes such as in Biopharm, Heat Treatment and Spray Coating. Available as both MFCs and MFMs, the IP66-rated I-250, I-500 and I-1000 are designed to be “reliable, cost effective solutions for today’s most rigorous industrial applications.” Simultaneous to this release, MKS is also releasing a G-Series version of the 250 slm product, the G-250.

The I-250, I-500 and I-1000 incorporate the latest digital mass flow control electronics; a proven, patented thermal sensor and mechanical design provide 1% of setpoint accuracy and precise control for full scale flow rates from 100 to 250 slm (I-250), 250 to 500 slm (I-500) and 500 to 1000 slm (I-1000). Multi-gas/multi-range capability is enabled through the onboard Ethernet interface and allows the user to change the gas and range of the instrument, reducing inventory requirements. The I-250, I-500 and I-1000 also feature the ability to convert flow measurements to the user’s unit of choice (e.g., slm, scfh, kg/hr.).

With the release of these products, the MKS I-Series mass flow products now provide customers with flow rate control capabilities extending from less than 1 sccm up to 1000 slm. Designed for use in harsh environments where resistance to liquid or dust ingress is essential, these elastomer-sealed instruments are available with analog I/O (0 to 5 VDC or 4 to 20 mA), with digital I/O soon to follow.